Istfa 2001
CNC milling tools are adapted to silicon thinning and polishing of packaged devices for backside application. ... The authors want to thank Benoit Bayol from Centech for his technical support on the Chip Unzip, Alexandre Douin at the CNESanbsp;...
| Title | : | Istfa 2001 |
| Author | : | ASM International |
| Publisher | : | ASM International - 2001 |
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