Microelectronic Device Technology
BEST COMBINATION OF Al AND Cu INTERCONNECTS In order to select the interconnect system, we have studied two cases for the Al and Cu wiring structure shown in Fig.4; one case is metal thickness constant and the other is resistanceanbsp;...
| Title | : | Microelectronic Device Technology |
| Author | : | |
| Publisher | : | Society of Photo Optical - 1999 |
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